JPH0230723Y2 - - Google Patents
Info
- Publication number
- JPH0230723Y2 JPH0230723Y2 JP14187783U JP14187783U JPH0230723Y2 JP H0230723 Y2 JPH0230723 Y2 JP H0230723Y2 JP 14187783 U JP14187783 U JP 14187783U JP 14187783 U JP14187783 U JP 14187783U JP H0230723 Y2 JPH0230723 Y2 JP H0230723Y2
- Authority
- JP
- Japan
- Prior art keywords
- optical path
- diffraction grating
- light source
- grating
- cylindrical member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 60
- 238000012544 monitoring process Methods 0.000 claims description 10
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14187783U JPS6049406U (ja) | 1983-09-13 | 1983-09-13 | 格子干渉計 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14187783U JPS6049406U (ja) | 1983-09-13 | 1983-09-13 | 格子干渉計 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6049406U JPS6049406U (ja) | 1985-04-06 |
| JPH0230723Y2 true JPH0230723Y2 (en]) | 1990-08-20 |
Family
ID=30317185
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14187783U Granted JPS6049406U (ja) | 1983-09-13 | 1983-09-13 | 格子干渉計 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6049406U (en]) |
-
1983
- 1983-09-13 JP JP14187783U patent/JPS6049406U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6049406U (ja) | 1985-04-06 |
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